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ASML 即将发货首台第二代 High NA EUV 光刻机 EXE:5200
IT之家 2 月 1 日消息,ASML 总裁兼首席执行官 Christophe Fouquet 在上月末的公司 2024 年第四季度财报电话会议上表示,该企业的首台第二代 0.55 (High) NA EUV 光刻机 TWINSCAN EXE:5200 即将以“早期工具”的身份开始发货,用于技术成熟度验证。 ▲ EXE:5000 系统 EXE:5200 ...
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